Overlay-aware detailed routing for self-aligned double patterning lithography using the cut process
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: 2014DOI: 10.1109/ICRERA.2014.7016559
Keyword(s): government policies,power system economics,renewable energy sources,DR system,EMS,ESS,Korea,convergent power system,demand response system,efficient energy use,energy management system,energy storage system,information and communication technology,potential business model,renewable energy industry,renewable energy policy,renewable energy source,unstable power supply,Air pollution,Government,Green products,Industries,Investment,Power generation,Renewable energy sources,EM
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Overlay-aware detailed routing for self-aligned double patterning lithography using the cut process
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| contributor author | Iou-Jen Liu , Shao-Yun Fang , Yao-Wen Chang | |
| date accessioned | 2020-03-12T20:38:54Z | |
| date available | 2020-03-12T20:38:54Z | |
| date issued | 2014 | |
| identifier other | 6881377.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1020628 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Overlay-aware detailed routing for self-aligned double patterning lithography using the cut process | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8145156 | |
| subject keywords | government policies | |
| subject keywords | power system economics | |
| subject keywords | renewable energy sources | |
| subject keywords | DR system | |
| subject keywords | EMS | |
| subject keywords | ESS | |
| subject keywords | Korea | |
| subject keywords | convergent power system | |
| subject keywords | demand response system | |
| subject keywords | efficient energy use | |
| subject keywords | energy management system | |
| subject keywords | energy storage system | |
| subject keywords | information and communication technology | |
| subject keywords | potential business model | |
| subject keywords | renewable energy industry | |
| subject keywords | renewable energy policy | |
| subject keywords | renewable energy source | |
| subject keywords | unstable power supply | |
| subject keywords | Air pollution | |
| subject keywords | Government | |
| subject keywords | Green products | |
| subject keywords | Industries | |
| subject keywords | Investment | |
| subject keywords | Power generation | |
| subject keywords | Renewable energy sources | |
| subject keywords | EM | |
| identifier doi | 10.1109/ICRERA.2014.7016559 | |
| journal title | esign Automation Conference (DAC), 2014 51st ACM/EDAC/IEEE | |
| filesize | 277796 | |
| citations | 0 |