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The Impact of SiO<formula formulatype="inline"> <img src="/images/tex/517.gif" alt="_{2}"> </formula>/SiN <formula formulatype="inline"> <img src="/images/tex/828.gif" alt="_{\\rm x}"> </formula> Stack Thickness on Laser Doping of Silicon Solar Cell

contributor authorLujia Xu
contributor authorWeber, Kival
contributor authorFell, Andreas
contributor authorHameiri, Ziv
contributor authorSieu Pheng Phang
contributor authorXinbo Yang
contributor authorFranklin, Evan
date accessioned2020-03-12T18:40:51Z
date available2020-03-12T18:40:51Z
date issued2014
identifier issn2156-3381
identifier other6714398.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/966642?show=full
formatgeneral
languageEnglish
publisherIEEE
titleThe Impact of SiO<formula formulatype="inline"> <img src="/images/tex/517.gif" alt="_{2}"> </formula>/SiN <formula formulatype="inline"> <img src="/images/tex/828.gif" alt="_{\\rm x}"> </formula> Stack Thickness on Laser Doping of Silicon Solar Cell
typeJournal Paper
contenttypeMetadata Only
identifier padid8000479
subject keywordscontact resistance
subject keywordsdielectric thin films
subject keywordsdoping profiles
subject keywordselemental semiconductors
subject keywordslaser materials processing
subject keywordssemiconductor device metallisation
subject keywordssemiconductor doping
subject keywordssemiconductor-metal boundaries
subject keywordssilicon
subject keywordssilicon compounds
subject keywordssolar cells
subject keywordssurface recombination
subject keywordsSiO<
subject keywordssub>
subject keywords2<
subject keywords/sub>
subject keywords-SiN<
subject keywordssub>
subject keywordsx<
subject keywords/sub>
subject keywords-Si
subject keywordscontact resistivity
subject keywordsdielectric film
subject keywordsdielectric stack
subject keywordsdielectric window
subject keywordsdoping profile
subject keywordslaser doped line
subject keywordslaser doping
subject keywordslaser parameters
subject keywordslaser system
subject keywordslayer thickness
identifier doi10.1109/JPHOTOV.2014.2298097
journal titlePhotovoltaics, IEEE Journal of
journal volume4
journal issue2
filesize570165
citations0


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