The Impact of SiO<formula formulatype="inline"> <img src="/images/tex/517.gif" alt="_{2}"> </formula>/SiN <formula formulatype="inline"> <img src="/images/tex/828.gif" alt="_{\\rm x}"> </formula> Stack Thickness on Laser Doping of Silicon Solar Cell
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سال
: 2014شناسه الکترونیک: 10.1109/JPHOTOV.2014.2298097
کلیدواژه(گان): contact resistance,dielectric thin films,doping profiles,elemental semiconductors,laser materials processing,semiconductor device metallisation,semiconductor doping,semiconductor-metal boundaries,silicon,silicon compounds,solar cells,surface recombination,SiO<,sub>,2<,/sub>,-SiN<,sub>,x<,/sub>,-Si,contact resistivity,dielectric film,dielectric stack,dielectric window,doping profile,laser doped line,laser doping,laser parameters,laser system,layer thickness
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The Impact of SiO<formula formulatype="inline"> <img src="/images/tex/517.gif" alt="_{2}"> </formula>/SiN <formula formulatype="inline"> <img src="/images/tex/828.gif" alt="_{\\rm x}"> </formula> Stack Thickness on Laser Doping of Silicon Solar Cell
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| contributor author | Lujia Xu | |
| contributor author | Weber, Kival | |
| contributor author | Fell, Andreas | |
| contributor author | Hameiri, Ziv | |
| contributor author | Sieu Pheng Phang | |
| contributor author | Xinbo Yang | |
| contributor author | Franklin, Evan | |
| date accessioned | 2020-03-12T18:40:51Z | |
| date available | 2020-03-12T18:40:51Z | |
| date issued | 2014 | |
| identifier issn | 2156-3381 | |
| identifier other | 6714398.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/966642?locale-attribute=fa | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | The Impact of SiO<formula formulatype="inline"> <img src="/images/tex/517.gif" alt="_{2}"> </formula>/SiN <formula formulatype="inline"> <img src="/images/tex/828.gif" alt="_{\\rm x}"> </formula> Stack Thickness on Laser Doping of Silicon Solar Cell | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8000479 | |
| subject keywords | contact resistance | |
| subject keywords | dielectric thin films | |
| subject keywords | doping profiles | |
| subject keywords | elemental semiconductors | |
| subject keywords | laser materials processing | |
| subject keywords | semiconductor device metallisation | |
| subject keywords | semiconductor doping | |
| subject keywords | semiconductor-metal boundaries | |
| subject keywords | silicon | |
| subject keywords | silicon compounds | |
| subject keywords | solar cells | |
| subject keywords | surface recombination | |
| subject keywords | SiO< | |
| subject keywords | sub> | |
| subject keywords | 2< | |
| subject keywords | /sub> | |
| subject keywords | -SiN< | |
| subject keywords | sub> | |
| subject keywords | x< | |
| subject keywords | /sub> | |
| subject keywords | -Si | |
| subject keywords | contact resistivity | |
| subject keywords | dielectric film | |
| subject keywords | dielectric stack | |
| subject keywords | dielectric window | |
| subject keywords | doping profile | |
| subject keywords | laser doped line | |
| subject keywords | laser doping | |
| subject keywords | laser parameters | |
| subject keywords | laser system | |
| subject keywords | layer thickness | |
| identifier doi | 10.1109/JPHOTOV.2014.2298097 | |
| journal title | Photovoltaics, IEEE Journal of | |
| journal volume | 4 | |
| journal issue | 2 | |
| filesize | 570165 | |
| citations | 0 |