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Comparison Between Single Shot Micromachining of Silicon With Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser

date accessioned2020-03-12T18:36:51Z
date available2020-03-12T18:36:51Z
date issued2014
identifier issn1077-260X
identifier other6687309.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/964391?show=full
formatgeneral
languageEnglish
publisherIEEE
titleComparison Between Single Shot Micromachining of Silicon With Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser
typeJournal Paper
contenttypeMetadata Only
identifier padid7997875
subject keywordselemental semiconductors
subject keywordshigh-speed optical techniques
subject keywordslaser beam machining
subject keywordslight interferometers
subject keywordsmicromachining
subject keywordsscanning electron microscopy
subject keywordssilicon
subject keywordssurface finishing
subject keywordsIR laser shaped pulses
subject keywordsMOPA based IR fiber lasers
subject keywordsSEM
subject keywordsSi
subject keywordsSi substrates
subject keywordsdynamic optical properties
subject keywordsfinishing quality
subject keywordshigh energy shaped pulses
subject keywordshigh power DPSS UV lasers
subject keywordslaser microprocessing system
subject keywordsmachined depth data
subject keywordsnanosecond pulse shaped IR fiber laser
subject keywordspulse shapeable IR fiber laser
subject keywordsrapid heating effects
subject keywordsr
identifier doi10.1109/JSTQE.2013.2295352
journal titleSelected Topics in Quantum Electronics, IEEE Journal of
journal volume20
journal issue5
filesize930585
citations1


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