Comparison Between Single Shot Micromachining of Silicon With Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser
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Year
: 2014DOI: 10.1109/JSTQE.2013.2295352
Keyword(s): elemental semiconductors,high-speed optical techniques,laser beam machining,light interferometers,micromachining,scanning electron microscopy,silicon,surface finishing,IR laser shaped pulses,MOPA based IR fiber lasers,SEM,Si,Si substrates,dynamic optical properties,finishing quality,high energy shaped pulses,high power DPSS UV lasers,laser microprocessing system,machined depth data,nanosecond pulse shaped IR fiber laser,pulse shapeable IR fiber laser,rapid heating effects,r
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Comparison Between Single Shot Micromachining of Silicon With Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser
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| date accessioned | 2020-03-12T18:36:51Z | |
| date available | 2020-03-12T18:36:51Z | |
| date issued | 2014 | |
| identifier issn | 1077-260X | |
| identifier other | 6687309.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/964391 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Comparison Between Single Shot Micromachining of Silicon With Nanosecond Pulse Shaped IR Fiber Laser and DPSS UV Laser | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 7997875 | |
| subject keywords | elemental semiconductors | |
| subject keywords | high-speed optical techniques | |
| subject keywords | laser beam machining | |
| subject keywords | light interferometers | |
| subject keywords | micromachining | |
| subject keywords | scanning electron microscopy | |
| subject keywords | silicon | |
| subject keywords | surface finishing | |
| subject keywords | IR laser shaped pulses | |
| subject keywords | MOPA based IR fiber lasers | |
| subject keywords | SEM | |
| subject keywords | Si | |
| subject keywords | Si substrates | |
| subject keywords | dynamic optical properties | |
| subject keywords | finishing quality | |
| subject keywords | high energy shaped pulses | |
| subject keywords | high power DPSS UV lasers | |
| subject keywords | laser microprocessing system | |
| subject keywords | machined depth data | |
| subject keywords | nanosecond pulse shaped IR fiber laser | |
| subject keywords | pulse shapeable IR fiber laser | |
| subject keywords | rapid heating effects | |
| subject keywords | r | |
| identifier doi | 10.1109/JSTQE.2013.2295352 | |
| journal title | Selected Topics in Quantum Electronics, IEEE Journal of | |
| journal volume | 20 | |
| journal issue | 5 | |
| filesize | 930585 | |
| citations | 1 |