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Micropump for Generation and Control of Vacuum Inside Miniature Devices

contributor authorGrzebyk, Tomasz P.
contributor authorGorecka-Drzazga, Anna
contributor authorDziuban, Jan /A/.
contributor authorZawada, A.
contributor authorKonarski, P.
date accessioned2020-03-12T18:33:03Z
date available2020-03-12T18:33:03Z
date issued2014
identifier issn1057-7157
identifier other6664998.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/962222?show=full
formatgeneral
languageEnglish
publisherIEEE
titleMicropump for Generation and Control of Vacuum Inside Miniature Devices
typeJournal Paper
contenttypeMetadata Only
identifier padid7995170
subject keywordscarbon nanotubes
subject keywordscathodes
subject keywordselectron field emission
subject keywordselectron sources
subject keywordsionisation
subject keywordsmicrocavities
subject keywordsmicropumps
subject keywordsvacuum control
subject keywordsC
subject keywordsactive pumping
subject keywordscarbon nanotubes cathode
subject keywordseffective emission properties
subject keywordsfield-emission electron source
subject keywordsion current measurement
subject keywordsion-sorption micropump
subject keywordsmicrocavity
subject keywordsmicroengineered MEMS
subject keywordsminiature devices
subject keywordsresidual gas ionization
subject keywordsvacuum control
subject keywordsvacuum generation
subject keywordsAnodes
subject keywordsCathodes
subject keywordsGettering
subject keywordsGlass
subject keywordsMicromechanical devices
subject keywordsMicropumps
subject keywordsSilicon
subject keywordsField-emission electr
identifier doi10.1109/JMEMS.2013.2288926
journal titleMicroelectromechanical Systems, Journal of
journal volume23
journal issue1
filesize796908
citations0


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