Micropump for Generation and Control of Vacuum Inside Miniature Devices
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Year
: 2014DOI: 10.1109/JMEMS.2013.2288926
Keyword(s): carbon nanotubes,cathodes,electron field emission,electron sources,ionisation,microcavities,micropumps,vacuum control,C,active pumping,carbon nanotubes cathode,effective emission properties,field-emission electron source,ion current measurement,ion-sorption micropump,microcavity,microengineered MEMS,miniature devices,residual gas ionization,vacuum control,vacuum generation,Anodes,Cathodes,Gettering,Glass,Micromechanical devices,Micropumps,Silicon,Field-emission electr
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Micropump for Generation and Control of Vacuum Inside Miniature Devices
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| contributor author | Grzebyk, Tomasz P. | |
| contributor author | Gorecka-Drzazga, Anna | |
| contributor author | Dziuban, Jan /A/. | |
| contributor author | Zawada, A. | |
| contributor author | Konarski, P. | |
| date accessioned | 2020-03-12T18:33:03Z | |
| date available | 2020-03-12T18:33:03Z | |
| date issued | 2014 | |
| identifier issn | 1057-7157 | |
| identifier other | 6664998.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/962222?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Micropump for Generation and Control of Vacuum Inside Miniature Devices | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 7995170 | |
| subject keywords | carbon nanotubes | |
| subject keywords | cathodes | |
| subject keywords | electron field emission | |
| subject keywords | electron sources | |
| subject keywords | ionisation | |
| subject keywords | microcavities | |
| subject keywords | micropumps | |
| subject keywords | vacuum control | |
| subject keywords | C | |
| subject keywords | active pumping | |
| subject keywords | carbon nanotubes cathode | |
| subject keywords | effective emission properties | |
| subject keywords | field-emission electron source | |
| subject keywords | ion current measurement | |
| subject keywords | ion-sorption micropump | |
| subject keywords | microcavity | |
| subject keywords | microengineered MEMS | |
| subject keywords | miniature devices | |
| subject keywords | residual gas ionization | |
| subject keywords | vacuum control | |
| subject keywords | vacuum generation | |
| subject keywords | Anodes | |
| subject keywords | Cathodes | |
| subject keywords | Gettering | |
| subject keywords | Glass | |
| subject keywords | Micromechanical devices | |
| subject keywords | Micropumps | |
| subject keywords | Silicon | |
| subject keywords | Field-emission electr | |
| identifier doi | 10.1109/JMEMS.2013.2288926 | |
| journal title | Microelectromechanical Systems, Journal of | |
| journal volume | 23 | |
| journal issue | 1 | |
| filesize | 796908 | |
| citations | 0 |