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Real-Time, In-Line, and Mapping Spectroscopic Ellipsometry for Applications in Cu(In <formula formulatype="inline"> <img src="/images/tex/21173.gif" alt="_{{\\bf 1}-{bm x}}"> </formula>Ga<formula formulatype="inline"> <img src="/images/tex/20922.gif" alt="_{bm x}"> </formula>)Se<formula formulatype="inline"> <img src="/images/tex/996.gif" alt="_{\\bf 2}"> <

contributor authorAryal, Puruswottam
contributor authorPradhan, Parth
contributor authorAttygalle, Dinesh
contributor authorIbdah, Abdel-Rahman /A/.
contributor authorAryal, Krishna
contributor authorRanjan, Viresh
contributor authorMarsillac, Sylvain
contributor authorPodraza, Nikolas J.
contributor authorCollins, Robert W.
date accessioned2020-03-12T18:29:32Z
date available2020-03-12T18:29:32Z
date issued2014
identifier issn2156-3381
identifier other6623109.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/960306?locale-attribute=fa&show=full
formatgeneral
languageEnglish
publisherIEEE
titleReal-Time, In-Line, and Mapping Spectroscopic Ellipsometry for Applications in Cu(In <formula formulatype="inline"> <img src="/images/tex/21173.gif" alt="_{{\\bf 1}-{bm x}}"> </formula>Ga<formula formulatype="inline"> <img src="/images/tex/20922.gif" alt="_{bm x}"> </formula>)Se<formula formulatype="inline"> <img src="/images/tex/996.gif" alt="_{\\bf 2}"> <
typeJournal Paper
contenttypeMetadata Only
identifier padid7992965
subject keywordscopper compounds
subject keywordsellipsometry
subject keywordsgallium compounds
subject keywordsgrain size
subject keywordsindium compounds
subject keywordssemiconductor thin films
subject keywordssolar cells
subject keywordsstoichiometry
subject keywordsternary semiconductors
subject keywordsthickness measurement
subject keywordsCIGS Cu stoichiometry
subject keywordsCIGS layer thicknesses
subject keywordsCu(In<
subject keywordssub>
subject keywords1-x<
subject keywords/sub>
subject keywordsGa<
subject keywordssub>
subject keywordsx<
subject keywords/sub>
subject keywords)Se<
subject keywordssub>
subject keywords2<
subject keywords/sub>
subject keywordsalloy composition
subject keywordscontact layer thickness
subject keywordscontactless metrologies
subject keywordsex situ single-spot analysis
subject keywordsgrain size
subject keywordshigh-speed multichannel spectroscopic ellipsometry
subject keywordsin-line mapping spectr
identifier doi10.1109/JPHOTOV.2013.2282745
journal titlePhotovoltaics, IEEE Journal of
journal volume4
journal issue1
filesize1810636
citations0


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