Real-Time, In-Line, and Mapping Spectroscopic Ellipsometry for Applications in Cu(In <formula formulatype="inline"> <img src="/images/tex/21173.gif" alt="_{{\\bf 1}-{bm x}}"> </formula>Ga<formula formulatype="inline"> <img src="/images/tex/20922.gif" alt="_{bm x}"> </formula>)Se<formula formulatype="inline"> <img src="/images/tex/996.gif" alt="_{\\bf 2}"> <
نویسنده:
, , , , , , , ,ناشر:
سال
: 2014شناسه الکترونیک: 10.1109/JPHOTOV.2013.2282745
کلیدواژه(گان): copper compounds,ellipsometry,gallium compounds,grain size,indium compounds,semiconductor thin films,solar cells,stoichiometry,ternary semiconductors,thickness measurement,CIGS Cu stoichiometry,CIGS layer thicknesses,Cu(In<,sub>,1-x<,/sub>,Ga<,sub>,x<,/sub>,)Se<,sub>,2<,/sub>,alloy composition,contact layer thickness,contactless metrologies,ex situ single-spot analysis,grain size,high-speed multichannel spectroscopic ellipsometry,in-line mapping spectr
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Real-Time, In-Line, and Mapping Spectroscopic Ellipsometry for Applications in Cu(In <formula formulatype="inline"> <img src="/images/tex/21173.gif" alt="_{{\\bf 1}-{bm x}}"> </formula>Ga<formula formulatype="inline"> <img src="/images/tex/20922.gif" alt="_{bm x}"> </formula>)Se<formula formulatype="inline"> <img src="/images/tex/996.gif" alt="_{\\bf 2}"> <
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contributor author | Aryal, Puruswottam | |
contributor author | Pradhan, Parth | |
contributor author | Attygalle, Dinesh | |
contributor author | Ibdah, Abdel-Rahman /A/. | |
contributor author | Aryal, Krishna | |
contributor author | Ranjan, Viresh | |
contributor author | Marsillac, Sylvain | |
contributor author | Podraza, Nikolas J. | |
contributor author | Collins, Robert W. | |
date accessioned | 2020-03-12T18:29:32Z | |
date available | 2020-03-12T18:29:32Z | |
date issued | 2014 | |
identifier issn | 2156-3381 | |
identifier other | 6623109.pdf | |
identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/960306 | |
format | general | |
language | English | |
publisher | IEEE | |
title | Real-Time, In-Line, and Mapping Spectroscopic Ellipsometry for Applications in Cu(In <formula formulatype="inline"> <img src="/images/tex/21173.gif" alt="_{{\\bf 1}-{bm x}}"> </formula>Ga<formula formulatype="inline"> <img src="/images/tex/20922.gif" alt="_{bm x}"> </formula>)Se<formula formulatype="inline"> <img src="/images/tex/996.gif" alt="_{\\bf 2}"> < | |
type | Journal Paper | |
contenttype | Metadata Only | |
identifier padid | 7992965 | |
subject keywords | copper compounds | |
subject keywords | ellipsometry | |
subject keywords | gallium compounds | |
subject keywords | grain size | |
subject keywords | indium compounds | |
subject keywords | semiconductor thin films | |
subject keywords | solar cells | |
subject keywords | stoichiometry | |
subject keywords | ternary semiconductors | |
subject keywords | thickness measurement | |
subject keywords | CIGS Cu stoichiometry | |
subject keywords | CIGS layer thicknesses | |
subject keywords | Cu(In< | |
subject keywords | sub> | |
subject keywords | 1-x< | |
subject keywords | /sub> | |
subject keywords | Ga< | |
subject keywords | sub> | |
subject keywords | x< | |
subject keywords | /sub> | |
subject keywords | )Se< | |
subject keywords | sub> | |
subject keywords | 2< | |
subject keywords | /sub> | |
subject keywords | alloy composition | |
subject keywords | contact layer thickness | |
subject keywords | contactless metrologies | |
subject keywords | ex situ single-spot analysis | |
subject keywords | grain size | |
subject keywords | high-speed multichannel spectroscopic ellipsometry | |
subject keywords | in-line mapping spectr | |
identifier doi | 10.1109/JPHOTOV.2013.2282745 | |
journal title | Photovoltaics, IEEE Journal of | |
journal volume | 4 | |
journal issue | 1 | |
filesize | 1810636 | |
citations | 0 |
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