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Pull-in Voltage Estimation of Microcantilever Beams With Effects of Residual Stress Gradients and Capacitance Fringing

contributor authorKuang-Shun Ou
contributor authorKuo-Shen Chen
date accessioned2020-03-12T18:27:08Z
date available2020-03-12T18:27:08Z
date issued2014
identifier issn1530-4388
identifier other6587523.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/958971?show=full
formatgeneral
languageEnglish
publisherIEEE
titlePull-in Voltage Estimation of Microcantilever Beams With Effects of Residual Stress Gradients and Capacitance Fringing
typeJournal Paper
contenttypeMetadata Only
identifier padid7991479
subject keywordsbeams (structures)
subject keywordscantilevers
subject keywordsfinite element analysis
subject keywordsinternal stresses
subject keywordsmicromechanical devices
subject keywordsJMEMS work
subject keywordsMEMS design engineers
subject keywordscapacitance fringing
subject keywordselectrostatic fringing
subject keywordsenergy approach
subject keywordsfinite-element simulation
subject keywordsmicrocantilever beams
subject keywordspull-in characteristics
subject keywordspull-in voltage estimation
subject keywordsresidual stress gradients
subject keywordsAtmospheric modeling
subject keywordsElectrostatics
subject keywordsFinite element analysis
subject keywordsMicromechanical devices
subject keywordsResidual stresses
subject keywordsStructural beams
subject keywordsEnergy method
subject keywordsfringing effect
subject keywordsmicrocantilev
identifier doi10.1109/TDMR.2013.2279891
journal titleDevice and Materials Reliability, IEEE Transactions on
journal volume14
journal issue1
filesize352696
citations1


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