Pull-in Voltage Estimation of Microcantilever Beams With Effects of Residual Stress Gradients and Capacitance Fringing
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: 2014DOI: 10.1109/TDMR.2013.2279891
Keyword(s): beams (structures),cantilevers,finite element analysis,internal stresses,micromechanical devices,JMEMS work,MEMS design engineers,capacitance fringing,electrostatic fringing,energy approach,finite-element simulation,microcantilever beams,pull-in characteristics,pull-in voltage estimation,residual stress gradients,Atmospheric modeling,Electrostatics,Finite element analysis,Micromechanical devices,Residual stresses,Structural beams,Energy method,fringing effect,microcantilev
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Pull-in Voltage Estimation of Microcantilever Beams With Effects of Residual Stress Gradients and Capacitance Fringing
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| contributor author | Kuang-Shun Ou | |
| contributor author | Kuo-Shen Chen | |
| date accessioned | 2020-03-12T18:27:08Z | |
| date available | 2020-03-12T18:27:08Z | |
| date issued | 2014 | |
| identifier issn | 1530-4388 | |
| identifier other | 6587523.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/958971?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Pull-in Voltage Estimation of Microcantilever Beams With Effects of Residual Stress Gradients and Capacitance Fringing | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 7991479 | |
| subject keywords | beams (structures) | |
| subject keywords | cantilevers | |
| subject keywords | finite element analysis | |
| subject keywords | internal stresses | |
| subject keywords | micromechanical devices | |
| subject keywords | JMEMS work | |
| subject keywords | MEMS design engineers | |
| subject keywords | capacitance fringing | |
| subject keywords | electrostatic fringing | |
| subject keywords | energy approach | |
| subject keywords | finite-element simulation | |
| subject keywords | microcantilever beams | |
| subject keywords | pull-in characteristics | |
| subject keywords | pull-in voltage estimation | |
| subject keywords | residual stress gradients | |
| subject keywords | Atmospheric modeling | |
| subject keywords | Electrostatics | |
| subject keywords | Finite element analysis | |
| subject keywords | Micromechanical devices | |
| subject keywords | Residual stresses | |
| subject keywords | Structural beams | |
| subject keywords | Energy method | |
| subject keywords | fringing effect | |
| subject keywords | microcantilev | |
| identifier doi | 10.1109/TDMR.2013.2279891 | |
| journal title | Device and Materials Reliability, IEEE Transactions on | |
| journal volume | 14 | |
| journal issue | 1 | |
| filesize | 352696 | |
| citations | 1 |