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contributor authorChung-yen Chao
contributor authorL. Jay Guo
date accessioned2020-03-10T23:08:25Z
date available2020-03-10T23:08:25Z
date issued2002
identifier otheryBnynN4H6Kj80u1Np0Z9rQL2WoC70OBvm3aQHH9mZrfOPFkqW0.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/331532?show=full
formatgeneral
languageEnglish
titlePolymer microring resonators fabricated by nanoimprint technique
typeJournal Paper
contenttypeFulltext
contenttypeFulltext
identifier padid2161278
identifier doi10.1116/1.1521729
journal titleJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
coverageAcademic
journal volume20
journal issue6
filesize624818
citations1


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