Polymer microring resonators fabricated by nanoimprint technique
Year
: 2002DOI: 10.1116/1.1521729
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Polymer microring resonators fabricated by nanoimprint technique
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| contributor author | Chung-yen Chao | |
| contributor author | L. Jay Guo | |
| date accessioned | 2020-03-10T23:08:25Z | |
| date available | 2020-03-10T23:08:25Z | |
| date issued | 2002 | |
| identifier other | yBnynN4H6Kj80u1Np0Z9rQL2WoC70OBvm3aQHH9mZrfOPFkqW0.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/331532?locale-attribute=en | |
| format | general | |
| language | English | |
| title | Polymer microring resonators fabricated by nanoimprint technique | |
| type | Journal Paper | |
| contenttype | Fulltext | |
| contenttype | Fulltext | |
| identifier padid | 2161278 | |
| identifier doi | 10.1116/1.1521729 | |
| journal title | Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures | |
| coverage | Academic | |
| journal volume | 20 | |
| journal issue | 6 | |
| filesize | 624818 | |
| citations | 1 |