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Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators

contributor authorLuca Belsito
contributor authorMatteo Ferri
contributor authorFulvio Mancarella
contributor authorLuca Masini
contributor authorJize Yan
contributor authorAshwin A. Seshia
contributor authorKenichi Soga
contributor authorAlberto Roncaglia
date accessioned2020-03-14T06:04:11Z
date available2020-03-14T06:04:11Z
date issued2016
identifier otherQUeOt0Us232_cj39N9hQbPy4nM5k0hMwGkB7xpUievk6e_OYG1.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1561526?show=full
formatgeneral
languageEnglish
titleFabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators
typeJournal Paper
contenttypeFulltext
contenttypeFulltext
identifier padid11365998
identifier doi10.1016/j.sna.2016.01.006
journal titleSensors and Actuators A: Physical
coverageAcademic
pages90-101
journal volume239
filesize3393219
citations1


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