Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators
نویسنده:
, , , , , , ,سال
: 2016شناسه الکترونیک: 10.1016/j.sna.2016.01.006
کالکشن
:
-
آمار بازدید
Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators
Show full item record
| contributor author | Luca Belsito | |
| contributor author | Matteo Ferri | |
| contributor author | Fulvio Mancarella | |
| contributor author | Luca Masini | |
| contributor author | Jize Yan | |
| contributor author | Ashwin A. Seshia | |
| contributor author | Kenichi Soga | |
| contributor author | Alberto Roncaglia | |
| date accessioned | 2020-03-14T06:04:11Z | |
| date available | 2020-03-14T06:04:11Z | |
| date issued | 2016 | |
| identifier other | QUeOt0Us232_cj39N9hQbPy4nM5k0hMwGkB7xpUievk6e_OYG1.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1561526?locale-attribute=fa | |
| format | general | |
| language | English | |
| title | Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators | |
| type | Journal Paper | |
| contenttype | Fulltext | |
| contenttype | Fulltext | |
| identifier padid | 11365998 | |
| identifier doi | 10.1016/j.sna.2016.01.006 | |
| journal title | Sensors and Actuators A: Physical | |
| coverage | Academic | |
| pages | 90-101 | |
| journal volume | 239 | |
| filesize | 3393219 | |
| citations | 1 |