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Closed-Loop Tracking of Large Displacements in Electro-Thermally Actuated <inline-formula> <img src="/images/tex/21661.gif" alt="{\\rm VO}_{2}"> </inline-formula>-Based MEMS

contributor authorMerced, Emmanuelle
contributor authorXiaobo Tan
contributor authorSepulveda, Nelson
date accessioned2020-03-12T23:47:36Z
date available2020-03-12T23:47:36Z
date issued2014
identifier issn1057-7157
identifier other6746008.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1123537?show=full
formatgeneral
languageEnglish
publisherIEEE
titleClosed-Loop Tracking of Large Displacements in Electro-Thermally Actuated <inline-formula> <img src="/images/tex/21661.gif" alt="{\\rm VO}_{2}"> </inline-formula>-Based MEMS
typeJournal Paper
contenttypeMetadata Only
identifier padid8303017
subject keywordsclosed loop systems
subject keywordsdisplacement control
subject keywordsmicroactuators
subject keywordsopen loop systems
subject keywordsstability
subject keywordsthree-term control
subject keywordsvanadium compounds
subject keywordsPID controller
subject keywordsVO<
subject keywordssub>
subject keywords2<
subject keywords/sub>
subject keywordsclosed-loop control
subject keywordsclosed-loop device actuation
subject keywordsclosed-loop tracking
subject keywordscomplicated hysteretic current behavior
subject keywordscreep
subject keywordsdevice characterization
subject keywordselectro-thermally actuated VO<
subject keywordssub>
subject keywords2-<
subject keywords/sub>
subject keywordsbased MEMS
subject keywordsfrequency response
subject keywordshighly accurate deflection control
subject keywordsintegrated heater
subject keywordslarge displacements
subject keywordsmicroelectromechani
identifier doi10.1109/JMEMS.2014.2304694
journal titleMicroelectromechanical Systems, Journal of
journal volume23
journal issue5
filesize4864865
citations0


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