Closed-Loop Tracking of Large Displacements in Electro-Thermally Actuated <inline-formula> <img src="/images/tex/21661.gif" alt="{\\rm VO}_{2}"> </inline-formula>-Based MEMS
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: 2014شناسه الکترونیک: 10.1109/JMEMS.2014.2304694
کلیدواژه(گان): closed loop systems,displacement control,microactuators,open loop systems,stability,three-term control,vanadium compounds,PID controller,VO<,sub>,2<,/sub>,closed-loop control,closed-loop device actuation,closed-loop tracking,complicated hysteretic current behavior,creep,device characterization,electro-thermally actuated VO<,sub>,2-<,/sub>,based MEMS,frequency response,highly accurate deflection control,integrated heater,large displacements,microelectromechani
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Closed-Loop Tracking of Large Displacements in Electro-Thermally Actuated <inline-formula> <img src="/images/tex/21661.gif" alt="{\\rm VO}_{2}"> </inline-formula>-Based MEMS
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| contributor author | Merced, Emmanuelle | |
| contributor author | Xiaobo Tan | |
| contributor author | Sepulveda, Nelson | |
| date accessioned | 2020-03-12T23:47:36Z | |
| date available | 2020-03-12T23:47:36Z | |
| date issued | 2014 | |
| identifier issn | 1057-7157 | |
| identifier other | 6746008.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1123537 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Closed-Loop Tracking of Large Displacements in Electro-Thermally Actuated <inline-formula> <img src="/images/tex/21661.gif" alt="{\\rm VO}_{2}"> </inline-formula>-Based MEMS | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8303017 | |
| subject keywords | closed loop systems | |
| subject keywords | displacement control | |
| subject keywords | microactuators | |
| subject keywords | open loop systems | |
| subject keywords | stability | |
| subject keywords | three-term control | |
| subject keywords | vanadium compounds | |
| subject keywords | PID controller | |
| subject keywords | VO< | |
| subject keywords | sub> | |
| subject keywords | 2< | |
| subject keywords | /sub> | |
| subject keywords | closed-loop control | |
| subject keywords | closed-loop device actuation | |
| subject keywords | closed-loop tracking | |
| subject keywords | complicated hysteretic current behavior | |
| subject keywords | creep | |
| subject keywords | device characterization | |
| subject keywords | electro-thermally actuated VO< | |
| subject keywords | sub> | |
| subject keywords | 2-< | |
| subject keywords | /sub> | |
| subject keywords | based MEMS | |
| subject keywords | frequency response | |
| subject keywords | highly accurate deflection control | |
| subject keywords | integrated heater | |
| subject keywords | large displacements | |
| subject keywords | microelectromechani | |
| identifier doi | 10.1109/JMEMS.2014.2304694 | |
| journal title | Microelectromechanical Systems, Journal of | |
| journal volume | 23 | |
| journal issue | 5 | |
| filesize | 4864865 | |
| citations | 0 |