The input shaping control of eletro-thermal MEMS micromirror
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سال
: 2014شناسه الکترونیک: 10.1109/SISPAD.2014.6931608
کلیدواژه(گان): electron traps,high-k dielectric thin films,leakage currents,nanostructured materials,permittivity,random noise,reliability,tunnelling,3D simulation,RTN,TAT,dielectric constant,electron movement,gate biases,high-K dielectrics,interlayer suboxide thickness,leakage current,local traps,nanoelectron devices,nanometer scaled gate area,permittivity,physical thickness,random telegraph noise,reliability,trap density,trap-assisted tunneling,Electric potential,Electron traps,Hi
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The input shaping control of eletro-thermal MEMS micromirror
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| contributor author | Minghui Shi , Hao Zhang , Qiao Chen | |
| date accessioned | 2020-03-12T20:43:04Z | |
| date available | 2020-03-12T20:43:04Z | |
| date issued | 2014 | |
| identifier other | 6885762.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1022953?locale-attribute=fa | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | The input shaping control of eletro-thermal MEMS micromirror | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8147760 | |
| subject keywords | electron traps | |
| subject keywords | high-k dielectric thin films | |
| subject keywords | leakage currents | |
| subject keywords | nanostructured materials | |
| subject keywords | permittivity | |
| subject keywords | random noise | |
| subject keywords | reliability | |
| subject keywords | tunnelling | |
| subject keywords | 3D simulation | |
| subject keywords | RTN | |
| subject keywords | TAT | |
| subject keywords | dielectric constant | |
| subject keywords | electron movement | |
| subject keywords | gate biases | |
| subject keywords | high-K dielectrics | |
| subject keywords | interlayer suboxide thickness | |
| subject keywords | leakage current | |
| subject keywords | local traps | |
| subject keywords | nanoelectron devices | |
| subject keywords | nanometer scaled gate area | |
| subject keywords | permittivity | |
| subject keywords | physical thickness | |
| subject keywords | random telegraph noise | |
| subject keywords | reliability | |
| subject keywords | trap density | |
| subject keywords | trap-assisted tunneling | |
| subject keywords | Electric potential | |
| subject keywords | Electron traps | |
| subject keywords | Hi | |
| identifier doi | 10.1109/SISPAD.2014.6931608 | |
| journal title | echatronics and Automation (ICMA), 2014 IEEE International Conference on | |
| filesize | 558897 | |
| citations | 0 |