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The input shaping control of eletro-thermal MEMS micromirror

contributor authorMinghui Shi , Hao Zhang , Qiao Chen
date accessioned2020-03-12T20:43:04Z
date available2020-03-12T20:43:04Z
date issued2014
identifier other6885762.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1022953?show=full
formatgeneral
languageEnglish
publisherIEEE
titleThe input shaping control of eletro-thermal MEMS micromirror
typeConference Paper
contenttypeMetadata Only
identifier padid8147760
subject keywordselectron traps
subject keywordshigh-k dielectric thin films
subject keywordsleakage currents
subject keywordsnanostructured materials
subject keywordspermittivity
subject keywordsrandom noise
subject keywordsreliability
subject keywordstunnelling
subject keywords3D simulation
subject keywordsRTN
subject keywordsTAT
subject keywordsdielectric constant
subject keywordselectron movement
subject keywordsgate biases
subject keywordshigh-K dielectrics
subject keywordsinterlayer suboxide thickness
subject keywordsleakage current
subject keywordslocal traps
subject keywordsnanoelectron devices
subject keywordsnanometer scaled gate area
subject keywordspermittivity
subject keywordsphysical thickness
subject keywordsrandom telegraph noise
subject keywordsreliability
subject keywordstrap density
subject keywordstrap-assisted tunneling
subject keywordsElectric potential
subject keywordsElectron traps
subject keywordsHi
identifier doi10.1109/SISPAD.2014.6931608
journal titleechatronics and Automation (ICMA), 2014 IEEE International Conference on
filesize558897
citations0


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