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Mechanism measurement of micro-displacement based on a novel MZ interferometer

contributor authorShuo Yuan , Zhengrong Tong , Weihua Zhang , Ye Cao
date accessioned2020-03-12T20:43:01Z
date available2020-03-12T20:43:01Z
date issued2014
identifier other6885722.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1022915?show=full
formatgeneral
languageEnglish
publisherIEEE
titleMechanism measurement of micro-displacement based on a novel MZ interferometer
typeConference Paper
contenttypeMetadata Only
identifier padid8147720
subject keywordsX-ray chemical analysis
subject keywordsX-ray diffraction
subject keywordsX-ray photoelectron spectra
subject keywordsannealing
subject keywordschemical vapour deposition
subject keywordselectrical resistivity
subject keywordsgrain size
subject keywordsiron compounds
subject keywordsthin films
subject keywordsAPCVD
subject keywordsEDS
subject keywordsFeS<
subject keywordssub>
subject keywords2<
subject keywords/sub>
subject keywordsMo-SiO<
subject keywordssub>
subject keywords2<
subject keywords/sub>
subject keywordsSiO<
subject keywordssub>
subject keywords2<
subject keywords/sub>
subject keywordsX-ray diffraction
subject keywordsX-ray photoelectron spectroscopy
subject keywordsannealing
subject keywordsatmospheric pressure chemical vapor deposition
subject keywordsband-gap
subject keywordsdepth profile
subject keywordselectrical resistivity
subject keywordselemental sulfur environment
subject keywordsenergy dispersive spectroscopy
identifier doi10.1109/PVSC.2014.6925411
journal titleechatronics and Automation (ICMA), 2014 IEEE International Conference on
filesize374944
citations0


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