Mechanism measurement of micro-displacement based on a novel MZ interferometer
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Year
: 2014DOI: 10.1109/PVSC.2014.6925411
Keyword(s): X-ray chemical analysis,X-ray diffraction,X-ray photoelectron spectra,annealing,chemical vapour deposition,electrical resistivity,grain size,iron compounds,thin films,APCVD,EDS,FeS<,sub>,2<,/sub>,Mo-SiO<,sub>,2<,/sub>,SiO<,sub>,2<,/sub>,X-ray diffraction,X-ray photoelectron spectroscopy,annealing,atmospheric pressure chemical vapor deposition,band-gap,depth profile,electrical resistivity,elemental sulfur environment,energy dispersive spectroscopy
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Mechanism measurement of micro-displacement based on a novel MZ interferometer
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| contributor author | Shuo Yuan , Zhengrong Tong , Weihua Zhang , Ye Cao | |
| date accessioned | 2020-03-12T20:43:01Z | |
| date available | 2020-03-12T20:43:01Z | |
| date issued | 2014 | |
| identifier other | 6885722.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1022915 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Mechanism measurement of micro-displacement based on a novel MZ interferometer | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8147720 | |
| subject keywords | X-ray chemical analysis | |
| subject keywords | X-ray diffraction | |
| subject keywords | X-ray photoelectron spectra | |
| subject keywords | annealing | |
| subject keywords | chemical vapour deposition | |
| subject keywords | electrical resistivity | |
| subject keywords | grain size | |
| subject keywords | iron compounds | |
| subject keywords | thin films | |
| subject keywords | APCVD | |
| subject keywords | EDS | |
| subject keywords | FeS< | |
| subject keywords | sub> | |
| subject keywords | 2< | |
| subject keywords | /sub> | |
| subject keywords | Mo-SiO< | |
| subject keywords | sub> | |
| subject keywords | 2< | |
| subject keywords | /sub> | |
| subject keywords | SiO< | |
| subject keywords | sub> | |
| subject keywords | 2< | |
| subject keywords | /sub> | |
| subject keywords | X-ray diffraction | |
| subject keywords | X-ray photoelectron spectroscopy | |
| subject keywords | annealing | |
| subject keywords | atmospheric pressure chemical vapor deposition | |
| subject keywords | band-gap | |
| subject keywords | depth profile | |
| subject keywords | electrical resistivity | |
| subject keywords | elemental sulfur environment | |
| subject keywords | energy dispersive spectroscopy | |
| identifier doi | 10.1109/PVSC.2014.6925411 | |
| journal title | echatronics and Automation (ICMA), 2014 IEEE International Conference on | |
| filesize | 374944 | |
| citations | 0 |