| contributor author | Zhongmei Shu , Yayao Zuo , Yong Tang | |
| date accessioned | 2020-03-12T20:01:35Z | |
| date available | 2020-03-12T20:01:35Z | |
| date issued | 2014 | |
| identifier other | 6846852.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/999015?show=full | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | TSIR: A Chinese Temporal semantics Information Retrieval system based on MapReduce | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8119293 | |
| subject keywords | etching | |
| subject keywords | masks | |
| subject keywords | photoresists | |
| subject keywords | silicon compounds | |
| subject keywords | CCP etcher | |
| subject keywords | PR strip step | |
| subject keywords | SiO< | |
| subject keywords | sub> | |
| subject keywords | 2< | |
| subject keywords | /sub> | |
| subject keywords | cost-effective amorphous silicon hard mask patterning | |
| subject keywords | metal filling | |
| subject keywords | nanoscale contact trench | |
| subject keywords | photoresist | |
| subject keywords | polymer mulation | |
| subject keywords | slightly tapered contact trench | |
| subject keywords | Abstracts | |
| subject keywords | CMOS integrated circuits | |
| subject keywords | Fabrication | |
| subject keywords | FinFETs | |
| subject keywords | Logic gates | |
| subject keywords | Resists | |
| subject keywords | Strips | |
| identifier doi | 10.1109/ICSICT.2014.7021617 | |
| journal title | omputer Supported Cooperative Work in Design (CSCWD), Proceedings of the 2014 IEEE 18th Internationa | |
| filesize | 398025 | |
| citations | 0 | |
