Analytical modeling of bending effect on the torsional response of electrostatically actuated micromirrors
سال
: 2013شناسه الکترونیک: 10.1016/j.ijleo.2012.06.025
کالکشن
:
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آمار بازدید
Analytical modeling of bending effect on the torsional response of electrostatically actuated micromirrors
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contributor author | Hamid Moeenfard | |
contributor author | Mohammad Taghi Ahmadian | |
date accessioned | 2020-03-13T02:55:57Z | |
date available | 2020-03-13T02:55:57Z | |
date issued | 2013 | |
identifier other | LpsUTyC9beKlFW5k84qpoBo_2op1TkvU_uFTj6CwrpnBmQIfE2.pdf | |
identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1183776 | |
format | general | |
language | English | |
title | Analytical modeling of bending effect on the torsional response of electrostatically actuated micromirrors | |
type | Journal Paper | |
contenttype | Fulltext | |
contenttype | Fulltext | |
identifier padid | 8574162 | |
identifier doi | 10.1016/j.ijleo.2012.06.025 | |
journal title | Optik - International Journal for Light and Electron Optics | |
coverage | Academic | |
pages | 1278-1286 | |
journal volume | 124 | |
journal issue | 12 | |
filesize | 1322045 | |
citations | 4 |