Analytical modeling of bending effect on the torsional response of electrostatically actuated micromirrors
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: 2013DOI: 10.1016/j.ijleo.2012.06.025
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Analytical modeling of bending effect on the torsional response of electrostatically actuated micromirrors
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| contributor author | Hamid Moeenfard | |
| contributor author | Mohammad Taghi Ahmadian | |
| date accessioned | 2020-03-13T02:55:57Z | |
| date available | 2020-03-13T02:55:57Z | |
| date issued | 2013 | |
| identifier other | LpsUTyC9beKlFW5k84qpoBo_2op1TkvU_uFTj6CwrpnBmQIfE2.pdf | |
| identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1183776?locale-attribute=en | |
| format | general | |
| language | English | |
| title | Analytical modeling of bending effect on the torsional response of electrostatically actuated micromirrors | |
| type | Journal Paper | |
| contenttype | Fulltext | |
| contenttype | Fulltext | |
| identifier padid | 8574162 | |
| identifier doi | 10.1016/j.ijleo.2012.06.025 | |
| journal title | Optik - International Journal for Light and Electron Optics | |
| coverage | Academic | |
| pages | 1278-1286 | |
| journal volume | 124 | |
| journal issue | 12 | |
| filesize | 1322045 | |
| citations | 4 |