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Mechanical Property Measurement of Carbon Infiltrated Carbon Nanotube Structures for Compliant Micromechanisms

contributor authorHanna, B.H.
contributor authorFazio, W.C.
contributor authorTanner, J.D.
contributor authorLund, J.M.
contributor authorWood, T.S.
contributor authorDavis, R.C.
contributor authorVanfleet, R.R.
contributor authorJensen, B.D.
date accessioned2020-03-12T23:56:47Z
date available2020-03-12T23:56:47Z
date issued2014
identifier issn1057-7157
identifier other6784315.pdf
identifier urihttp://libsearch.um.ac.ir:80/fum/handle/fum/1128976?show=full
formatgeneral
languageEnglish
publisherIEEE
titleMechanical Property Measurement of Carbon Infiltrated Carbon Nanotube Structures for Compliant Micromechanisms
typeJournal Paper
contenttypeMetadata Only
identifier padid8309254
subject keywordsYoung'
subject keywordss modulus
subject keywordsbending
subject keywordscantilevers
subject keywordscarbon nanotubes
subject keywordschemical vapour deposition
subject keywordsmicromechanical devices
subject keywordsstress relaxation
subject keywords3-point bending tests
subject keywordsCNT
subject keywordsMEMS applications
subject keywordsYoung'
subject keywordss modulus
subject keywordscantilever beam samples
subject keywordscarbon nanotubes
subject keywordschemical vapor deposition
subject keywordsdense lithographically patterned forests
subject keywordsfailure strain
subject keywordsfailure stress
subject keywordsframework structures
subject keywordsmicroelectromechanical systems applications
subject keywordsrectangular beams
subject keywordssolid structures
subject keywordsstress relaxation
subject keywordstransverse direction
subject keywordsvertical
identifier doi10.1109/JMEMS.2014.2312847
journal titleMicroelectromechanical Systems, Journal of
journal volume23
journal issue6
filesize5473717
citations0


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