contributor author | Hanna, B.H. | |
contributor author | Fazio, W.C. | |
contributor author | Tanner, J.D. | |
contributor author | Lund, J.M. | |
contributor author | Wood, T.S. | |
contributor author | Davis, R.C. | |
contributor author | Vanfleet, R.R. | |
contributor author | Jensen, B.D. | |
date accessioned | 2020-03-12T23:56:47Z | |
date available | 2020-03-12T23:56:47Z | |
date issued | 2014 | |
identifier issn | 1057-7157 | |
identifier other | 6784315.pdf | |
identifier uri | http://libsearch.um.ac.ir:80/fum/handle/fum/1128976?show=full | |
format | general | |
language | English | |
publisher | IEEE | |
title | Mechanical Property Measurement of Carbon Infiltrated Carbon Nanotube Structures for Compliant Micromechanisms | |
type | Journal Paper | |
contenttype | Metadata Only | |
identifier padid | 8309254 | |
subject keywords | Young' | |
subject keywords | s modulus | |
subject keywords | bending | |
subject keywords | cantilevers | |
subject keywords | carbon nanotubes | |
subject keywords | chemical vapour deposition | |
subject keywords | micromechanical devices | |
subject keywords | stress relaxation | |
subject keywords | 3-point bending tests | |
subject keywords | CNT | |
subject keywords | MEMS applications | |
subject keywords | Young' | |
subject keywords | s modulus | |
subject keywords | cantilever beam samples | |
subject keywords | carbon nanotubes | |
subject keywords | chemical vapor deposition | |
subject keywords | dense lithographically patterned forests | |
subject keywords | failure strain | |
subject keywords | failure stress | |
subject keywords | framework structures | |
subject keywords | microelectromechanical systems applications | |
subject keywords | rectangular beams | |
subject keywords | solid structures | |
subject keywords | stress relaxation | |
subject keywords | transverse direction | |
subject keywords | vertical | |
identifier doi | 10.1109/JMEMS.2014.2312847 | |
journal title | Microelectromechanical Systems, Journal of | |
journal volume | 23 | |
journal issue | 6 | |
filesize | 5473717 | |
citations | 0 | |