| contributor author | Meng Wang , Zhenhua Duan , Cong Tian |  | 
| date accessioned | 2020-03-12T20:01:36Z |  | 
| date available | 2020-03-12T20:01:36Z |  | 
| date issued | 2014 |  | 
| identifier other | 6846870.pdf |  | 
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/999032?locale-attribute=en&show=full |  | 
| format | general |  | 
| language | English |  | 
| publisher | IEEE |  | 
| title | Simulation and verification of the virtual memory management system with MSVL |  | 
| type | Conference Paper |  | 
| contenttype | Metadata Only |  | 
| identifier padid | 8119315 |  | 
| subject keywords | cantilevers |  | 
| subject keywords | elasticity |  | 
| subject keywords | finite element analysis |  | 
| subject keywords | internal stresses |  | 
| subject keywords | manufacturing processes |  | 
| subject keywords | micromechanical devices |  | 
| subject keywords | thin film devices |  | 
| subject keywords | ANSYS software |  | 
| subject keywords | MEMS thin film feature |  | 
| subject keywords | deflection angle |  | 
| subject keywords | elasticity formulas |  | 
| subject keywords | finite element analysis |  | 
| subject keywords | geometric principles |  | 
| subject keywords | high accuracy process |  | 
| subject keywords | low deviation process |  | 
| subject keywords | manufacturing process |  | 
| subject keywords | residual stress test structure |  | 
| subject keywords | simplified process |  | 
| subject keywords | single-cantilever-beam microrotating structure |  | 
| subject keywords | structural parameter |  | 
| subject keywords | Abstracts |  | 
| subject keywords | Films |  | 
| subject keywords | Gallium arsenide |  | 
| subject keywords | Manufactu |  | 
| identifier doi | 10.1109/ICSICT.2014.7021635 |  | 
| journal title | omputer Supported Cooperative Work in Design (CSCWD), Proceedings of the 2014 IEEE 18th Internationa |  | 
| filesize | 392440 |  | 
| citations | 0 |  |