Selective formation of an ultra-thin pore seal on mesorporous low-k for a copper dual damascene structure
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Year
: 2014DOI: 10.1109/ISCISC.2014.6994012
Keyword(s): Boolean functions,Ciphers,Educational institutions,Encryption,Probability distribution,Rabbits,Asymptotic Probability Distribution,Component Boolean Function,Square Map,Square Root Map,Vectorial Boolean Function
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Selective formation of an ultra-thin pore seal on mesorporous low-k for a copper dual damascene structure
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| date accessioned | 2020-03-12T19:51:05Z | |
| date available | 2020-03-12T19:51:05Z | |
| date issued | 2014 | |
| identifier other | 6831890.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/992456?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Selective formation of an ultra-thin pore seal on mesorporous low-k for a copper dual damascene structure | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8111544 | |
| subject keywords | Boolean functions | |
| subject keywords | Ciphers | |
| subject keywords | Educational institutions | |
| subject keywords | Encryption | |
| subject keywords | Probability distribution | |
| subject keywords | Rabbits | |
| subject keywords | Asymptotic Probability Distribution | |
| subject keywords | Component Boolean Function | |
| subject keywords | Square Map | |
| subject keywords | Square Root Map | |
| subject keywords | Vectorial Boolean Function | |
| identifier doi | 10.1109/ISCISC.2014.6994012 | |
| journal title | nterconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), 2014 IEEE Internat | |
| filesize | 285418 | |
| citations | 0 | |
| contributor rawauthor | Kayaba, Y. , Tanaka, H. , Suzuki, T. , Kohmura, K. , Ono, S.S. |