HF etching mechanisms of advanced low-k films
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Year
: 2014DOI: 10.1049/cp.2014.0913
Keyword(s): condition monitoring,gears,infrared detectors,lubricating oils,wind turbines,condition monitoring,detector,nondispersive infra-red analysis,nondispersive infra-red sensors,viscosity,wind turbine gearbox oil,Condition monitoring,NDIR,gearbox oil,oil analysis,wind turbine
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HF etching mechanisms of advanced low-k films
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| date accessioned | 2020-03-12T19:51:01Z | |
| date available | 2020-03-12T19:51:01Z | |
| date issued | 2014 | |
| identifier other | 6831851.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/992417?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | HF etching mechanisms of advanced low-k films | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8111503 | |
| subject keywords | condition monitoring | |
| subject keywords | gears | |
| subject keywords | infrared detectors | |
| subject keywords | lubricating oils | |
| subject keywords | wind turbines | |
| subject keywords | condition monitoring | |
| subject keywords | detector | |
| subject keywords | nondispersive infra-red analysis | |
| subject keywords | nondispersive infra-red sensors | |
| subject keywords | viscosity | |
| subject keywords | wind turbine gearbox oil | |
| subject keywords | Condition monitoring | |
| subject keywords | NDIR | |
| subject keywords | gearbox oil | |
| subject keywords | oil analysis | |
| subject keywords | wind turbine | |
| identifier doi | 10.1049/cp.2014.0913 | |
| journal title | nterconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), 2014 IEEE Internat | |
| filesize | 458896 | |
| citations | 0 | |
| contributor rawauthor | Verdonck, P. , Quoc Toan Le , Krishtab, M. , Vanstreels, K. , Armini, S. , Simone, A. , Mai Phuong Nguyen , Baklanov, M.R. , Van Elshocht, S. |