شناسه الکترونیک: 10.1109/SBMicro.2014.6940110

کلیدواژه(گان): CMOS integrated circuits,microlenses,optical fabrication,photoconductivity,photodetectors,photodiodes,photoresists,AZ4562 photoresist,CMOS,glass substrate,light-current conversion,light-photocurrent conversion,microlenses,photodetectors,photodiode,size 150 mum,size 170 mum,size 24 mum to 5 mum,size 240 mum,CMOS integrated circuits,Optical device fabrication,Optical sensors,Optical variables measurement,Photodiodes,Substrates,Voltage measurement,image sensor,light-curre