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contributor authorVirmani, C. , Pillai, A. , Juneja, D.
date accessioned2020-03-12T19:38:49Z
date available2020-03-12T19:38:49Z
date issued2014
identifier other6798314.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/984794?locale-attribute=en&show=full
formatgeneral
languageEnglish
publisherIEEE
titleStudy and analysis of Social network Aggregator
typeConference Paper
contenttypeMetadata Only
identifier padid8100305
subject keywordsdoping profiles
subject keywordselectrostatics
subject keywordsion implantation
subject keywordsAxcelis HE3
subject keywordsCIS manufacturers
subject keywordsIC manufacturers
subject keywordsPurion XE high energy ion implanter
subject keywordsangle control
subject keywordsbatch implanters
subject keywordsbox-like dopant profile
subject keywordscone angle effect
subject keywordsdamage characteristics
subject keywordsdamage engineering
subject keywordsdamage reduction
subject keywordsdose stability
subject keywordselectrostatic scanning
subject keywordsparadigm XE systems
subject keywordsserial high energy ion implanters
subject keywordssystem mechanical throughput limit utilization
subject keywordstool architecture
subject keywordsCurrent measurement
subject keywordsElectrostatics
subject keywordsImplants
subject keywordsIon beams
subject keywordsSt
identifier doi10.1109/IIT.2014.6940022
journal titleptimization, Reliabilty, and Information Technology (ICROIT), 2014 International Conference on
filesize562610
citations1


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