Study and analysis of Social network Aggregator
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Year
: 2014DOI: 10.1109/IIT.2014.6940022
Keyword(s): doping profiles,electrostatics,ion implantation,Axcelis HE3,CIS manufacturers,IC manufacturers,Purion XE high energy ion implanter,angle control,batch implanters,box-like dopant profile,cone angle effect,damage characteristics,damage engineering,damage reduction,dose stability,electrostatic scanning,paradigm XE systems,serial high energy ion implanters,system mechanical throughput limit utilization,tool architecture,Current measurement,Electrostatics,Implants,Ion beams,St
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Study and analysis of Social network Aggregator
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| contributor author | Virmani, C. , Pillai, A. , Juneja, D. | |
| date accessioned | 2020-03-12T19:38:49Z | |
| date available | 2020-03-12T19:38:49Z | |
| date issued | 2014 | |
| identifier other | 6798314.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/984794?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Study and analysis of Social network Aggregator | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8100305 | |
| subject keywords | doping profiles | |
| subject keywords | electrostatics | |
| subject keywords | ion implantation | |
| subject keywords | Axcelis HE3 | |
| subject keywords | CIS manufacturers | |
| subject keywords | IC manufacturers | |
| subject keywords | Purion XE high energy ion implanter | |
| subject keywords | angle control | |
| subject keywords | batch implanters | |
| subject keywords | box-like dopant profile | |
| subject keywords | cone angle effect | |
| subject keywords | damage characteristics | |
| subject keywords | damage engineering | |
| subject keywords | damage reduction | |
| subject keywords | dose stability | |
| subject keywords | electrostatic scanning | |
| subject keywords | paradigm XE systems | |
| subject keywords | serial high energy ion implanters | |
| subject keywords | system mechanical throughput limit utilization | |
| subject keywords | tool architecture | |
| subject keywords | Current measurement | |
| subject keywords | Electrostatics | |
| subject keywords | Implants | |
| subject keywords | Ion beams | |
| subject keywords | St | |
| identifier doi | 10.1109/IIT.2014.6940022 | |
| journal title | ptimization, Reliabilty, and Information Technology (ICROIT), 2014 International Conference on | |
| filesize | 562610 | |
| citations | 1 |