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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever

contributor authorKobayashi, T.
contributor authorOyama, S.
contributor authorOkada, H.
contributor authorMakimoto, N.
contributor authorTanaka, K.
contributor authorItoh, T.
contributor authorMaeda, R.
date accessioned2020-03-12T09:57:54Z
date available2020-03-12T09:57:54Z
date issued2012
identifier otherrSrwFO_fal4kuU0TxBem3BTiEfkYgcnblD_yv4Kz4yHMeTHOqM.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/827700?locale-attribute=fa&show=full
formatgeneral
languageEnglish
title[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever
typeJournal Paper
contenttypeFulltext
contenttypeFulltext
identifier padid6552986
identifier doi10.1109/MEMSYS.2012.6170178
journal titleOsmania Journal of Social Sciences
coverageAcademic
pages527-530
filesize1867785
citations4


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