Material and Geometrical Characteristics Investigation of Micro-beam on Pull-in Voltage Using FEM and Taguchi DOE

Abstract

In this work, a fully clamped micro-beam is modeled using commercial FEM software (COMSOL<br><br>Multiphysics). The model is designed to investigate the pull-in instability of the micro-beam under the effect of<br><br>electrostatic field induced by the applied voltage. To this end, the device is modeled in 2-D space which has<br><br>rapid calculation procedure and decreases time and cost of calculation. The micro-beam is also modeled in 3-D space which is more pursuant to the reality and its results are quite compatible with previous works in the<br><br>literature. Finally effects of different characteristics of micro-beam including material and geometrical<br><br>properties are investigated on pull-in voltage using Taguchi DOE.