Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983

contributor author	L F Thompson
contributor author	C G Willson
contributor author	M J Bowden
contributor author	American Chemical Society. Meeting (eds.)
date accessioned	2020-04-21T19:33:32Z
date available	2020-04-21T19:33:32Z
date copyright	1983
identifier isbn	0841207755,9780841207752
identifier other	/pad-books/801000-900000/872000/568d45badbfd8ff1949f4afaa9187815.djvu
identifier uri	https://libsearch.um.ac.ir:443/fum/handle/fum/3031909?locale-attribute=en&show=full
format mimetype	application/djvu
language	English
publisher	American Chemical Society
title	Introduction to microlithography : theory, materials, and processing : based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983
type	Ebook
contenttype	Fulltext
identifier padid	934377
coverage	general
pages	364
filesize	5036192
identifier link	https://pad.um.ac.ir/file/view/934377
series	ACS symposium series, 219
contributor rawauthor	American Chemical Society. Division of Organic Coatings and Plastics Chemistry.