Viscous air damping in laterally driven microresonators
DOI: 10.1109/MEMSYS.1994.555623
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Viscous air damping in laterally driven microresonators
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| contributor author | Xia Zhang | |
| contributor author | W.C. Tang | |
| date accessioned | 2020-03-15T03:52:38Z | |
| date available | 2020-03-15T03:52:38Z | |
| identifier other | WQJqBkRHq7qxF1KlZfPU08bJkz8wBNBFfKWzIPD6E8DOV_7F3p.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1835365?locale-attribute=en | |
| format | general | |
| language | English | |
| title | Viscous air damping in laterally driven microresonators | |
| type | Journal Paper | |
| contenttype | Fulltext | |
| contenttype | Fulltext | |
| identifier padid | 12980041 | |
| identifier doi | 10.1109/MEMSYS.1994.555623 | |
| journal title | Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Act | |
| coverage | Academic | |
| filesize | 641884 | |
| citations | 1 |