The Effect of Microstructure on AlN MEMS Resonator Response
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: 2003DOI: 10.1080/10584580390258976
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The Effect of Microstructure on AlN MEMS Resonator Response
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| contributor author | A. E. Wickenden | |
| contributor author | L. J. Currano | |
| contributor author | T. Takacs | |
| contributor author | J. Pulskamp | |
| contributor author | M. Dubey | |
| contributor author | S. Hullavarad | |
| contributor author | R. D. Vispute | |
| date accessioned | 2020-03-14T06:04:10Z | |
| date available | 2020-03-14T06:04:10Z | |
| date issued | 2003 | |
| identifier other | ZDAKOXVeviBFsGTxaSkD51VLLwtNpBq3LJfXA9vwhTtEXcavcp.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1561519?locale-attribute=en | |
| format | general | |
| language | English | |
| title | The Effect of Microstructure on AlN MEMS Resonator Response | |
| type | Journal Paper | |
| contenttype | Fulltext | |
| contenttype | Fulltext | |
| identifier padid | 11365982 | |
| identifier doi | 10.1080/10584580390258976 | |
| journal title | Integrated Ferroelectrics | |
| coverage | Academic | |
| pages | 565-574 | |
| journal volume | 54 | |
| journal issue | 1 | |
| filesize | 242475 | |
| citations | 0 |