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Motion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation

contributor authorGu, Guo-Ying
contributor authorZhu, Li-Min
contributor authorSu, Chun-Yi
contributor authorDing, Han
date accessioned2020-03-13T01:19:09Z
date available2020-03-13T01:19:09Z
date issued2013
identifier othereQZO4nA0OCCM2ERConZ8RNS8QUZqz8M1WqROL9mpoinsJA6BCE.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1162056?locale-attribute=en&show=full
formatgeneral
languageEnglish
titleMotion Control of Piezoelectric Positioning Stages: Modeling, Controller Design, and Experimental Evaluation
typeJournal Paper
contenttypeFulltext
contenttypeFulltext
identifier padid8419283
identifier doi10.1109/TMECH.2012.2203315
coverageAcademic
pages1459-1471
journal volume18
journal issue5
filesize1614308
citations1


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