Structured diaphragm with a centre boss and four peninsulas for high sensitivity and high linearity pressure sensors
ناشر:
سال
: 2014شناسه الکترونیک: 10.1049/mnl.2014.0154
کلیدواژه(گان): diaphragms,finite element analysis,measurement errors,microsensors,pressure measurement,pressure sensors,CBP structure,MEMS pressure sensor fabrication,centre boss and peninsulas,hnite element analysis,low pressure applications,nonlinearity error,pressure 0 kPa to 5 kPa,pressure measurement,structured diaphragm
کالکشن
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آمار بازدید
Structured diaphragm with a centre boss and four peninsulas for high sensitivity and high linearity pressure sensors
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| contributor author | Xian Huang | |
| contributor author | Dacheng Zhang | |
| date accessioned | 2020-03-13T00:16:32Z | |
| date available | 2020-03-13T00:16:32Z | |
| date issued | 2014 | |
| identifier issn | 1750-0443 | |
| identifier other | 6869206.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1140730 | |
| format | general | |
| language | English | |
| publisher | IET | |
| title | Structured diaphragm with a centre boss and four peninsulas for high sensitivity and high linearity pressure sensors | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8323115 | |
| subject keywords | diaphragms | |
| subject keywords | finite element analysis | |
| subject keywords | measurement errors | |
| subject keywords | microsensors | |
| subject keywords | pressure measurement | |
| subject keywords | pressure sensors | |
| subject keywords | CBP structure | |
| subject keywords | MEMS pressure sensor fabrication | |
| subject keywords | centre boss and peninsulas | |
| subject keywords | hnite element analysis | |
| subject keywords | low pressure applications | |
| subject keywords | nonlinearity error | |
| subject keywords | pressure 0 kPa to 5 kPa | |
| subject keywords | pressure measurement | |
| subject keywords | structured diaphragm | |
| identifier doi | 10.1049/mnl.2014.0154 | |
| journal title | Micro & Nano Letters, IET | |
| journal volume | 9 | |
| journal issue | 7 | |
| filesize | 440904 | |
| citations | 0 |