Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid
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Year
: 2014DOI: 10.1109/LED.2014.2331675
Keyword(s): Q-factor,atomic force microscopy,displacement measurement,electrostatic actuators,force measurement,force sensors,micromechanical resonators,microsensors,nanosensors,atomic level force measurement,atomic resolution disk resonant displacement sensor,atomic resolution disk resonant force sensor,displacement measurement,displacement resolution,flexible extensional mode resonant microstructure,force resolution,integrated comb-drive electrostatic actuators,levering mechanism,liquid
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Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid
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| contributor author | Mehdizadeh, Emad | |
| contributor author | Rostami, Mohamad | |
| contributor author | Xiaobo Guo | |
| contributor author | Pourkamali, Siavash | |
| date accessioned | 2020-03-13T00:11:59Z | |
| date available | 2020-03-13T00:11:59Z | |
| date issued | 2014 | |
| identifier issn | 0741-3106 | |
| identifier other | 6847687.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1137950?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Atomic Resolution Disk Resonant Force and Displacement Sensors for Measurements in Liquid | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8319938 | |
| subject keywords | Q-factor | |
| subject keywords | atomic force microscopy | |
| subject keywords | displacement measurement | |
| subject keywords | electrostatic actuators | |
| subject keywords | force measurement | |
| subject keywords | force sensors | |
| subject keywords | micromechanical resonators | |
| subject keywords | microsensors | |
| subject keywords | nanosensors | |
| subject keywords | atomic level force measurement | |
| subject keywords | atomic resolution disk resonant displacement sensor | |
| subject keywords | atomic resolution disk resonant force sensor | |
| subject keywords | displacement measurement | |
| subject keywords | displacement resolution | |
| subject keywords | flexible extensional mode resonant microstructure | |
| subject keywords | force resolution | |
| subject keywords | integrated comb-drive electrostatic actuators | |
| subject keywords | levering mechanism | |
| subject keywords | liquid | |
| identifier doi | 10.1109/LED.2014.2331675 | |
| journal title | Electron Device Letters, IEEE | |
| journal volume | 35 | |
| journal issue | 8 | |
| filesize | 1406608 | |
| citations | 0 |