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Unusual Cathode Erosion Patterns Observed for Steered Arc Sources

contributor authorKolbeck, Jonathan
contributor authorAnders, Andre
date accessioned2020-03-13T00:10:05Z
date available2020-03-13T00:10:05Z
date issued2014
identifier issn0093-3813
identifier other6840333.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1136824?locale-attribute=fa&show=full
formatgeneral
languageEnglish
publisherIEEE
titleUnusual Cathode Erosion Patterns Observed for Steered Arc Sources
typeJournal Paper
contenttypeMetadata Only
identifier padid8318596
subject keywordsarcs (electric)
subject keywordsargon
subject keywordscathodes
subject keywordserosion
subject keywordsgas mixtures
subject keywordsoxygen
subject keywordsplasma diagnostics
subject keywordsplasma sources
subject keywordsAr-O<
subject keywordssub>
subject keywords2<
subject keywords/sub>
subject keywordsargon-oxygen mixture
subject keywordscathode erosion patterns
subject keywordscathodic arc source
subject keywordscathodic arc spot
subject keywordslinear macroparticle filter
subject keywordsmagnetron-type magnetic field
subject keywordsperiodic groves
subject keywordsperiodic ridges
subject keywordsplasma distributions
subject keywordspressure 0.5 Pa
subject keywordspure argon background
subject keywordssteered arc sources
subject keywordsArgon
subject keywordsCathodes
subject keywordsIgnition
subject keywordsPlasmas
subject keywordsSurface impedance
subject keywordsSurface treatment
subject keywordsVacuum arcs
subject keywordsArc discharges
subject keywordsc
identifier doi10.1109/TPS.2014.2328333
journal titlePlasma Science, IEEE Transactions on
journal volume42
journal issue10
filesize1155461
citations0


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