Dopingless super-steep impact ionisation MOS (dopingless-IMOS) based on workfunction engineering
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سال
: 2014شناسه الکترونیک: 10.1049/el.2014.1072
کلیدواژه(گان): MOSFET,electrodes,elemental semiconductors,impact ionisation,ion implantation,masks,silicon,technology CAD (electronics),Si,charge plasma,charge plasma formation,dopingless super-steep impact ionisation MOS,dopingless-IMOS,impact-ionisation metal oxide semiconductor field effect transistor,intrinsic Debye length,intrinsic silicon film,metal electrode,n-type drain,p-type source,photo masking,random dopant fluctuation,two-dimensional TCAD Sentaurus,work-function engineering
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Dopingless super-steep impact ionisation MOS (dopingless-IMOS) based on workfunction engineering
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contributor author | Singh, Sushil | |
contributor author | Kondekar, P.N. | |
date accessioned | 2020-03-13T00:09:18Z | |
date available | 2020-03-13T00:09:18Z | |
date issued | 2014 | |
identifier issn | 0013-5194 | |
identifier other | 6836733.pdf | |
identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1136354 | |
format | general | |
language | English | |
publisher | IET | |
title | Dopingless super-steep impact ionisation MOS (dopingless-IMOS) based on workfunction engineering | |
type | Journal Paper | |
contenttype | Metadata Only | |
identifier padid | 8318023 | |
subject keywords | MOSFET | |
subject keywords | electrodes | |
subject keywords | elemental semiconductors | |
subject keywords | impact ionisation | |
subject keywords | ion implantation | |
subject keywords | masks | |
subject keywords | silicon | |
subject keywords | technology CAD (electronics) | |
subject keywords | Si | |
subject keywords | charge plasma | |
subject keywords | charge plasma formation | |
subject keywords | dopingless super-steep impact ionisation MOS | |
subject keywords | dopingless-IMOS | |
subject keywords | impact-ionisation metal oxide semiconductor field effect transistor | |
subject keywords | intrinsic Debye length | |
subject keywords | intrinsic silicon film | |
subject keywords | metal electrode | |
subject keywords | n-type drain | |
subject keywords | p-type source | |
subject keywords | photo masking | |
subject keywords | random dopant fluctuation | |
subject keywords | two-dimensional TCAD Sentaurus | |
subject keywords | work-function engineering | |
identifier doi | 10.1049/el.2014.1072 | |
journal title | Electronics Letters | |
journal volume | 50 | |
journal issue | 12 | |
filesize | 499441 | |
citations | 0 |