Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation
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Year
: 2014DOI: 10.1109/JMEMS.2014.2314702
Keyword(s): electroplating,foils,ink jet printing,microactuators,microfluidics,polymers,surface treatment,SU-8,cleanroom-free fabrication process,device geometry,electroplating,fluid ejection,foil-level inkjet-printed pyroMEMS balloon actuators,igniter,inflation height,inkjet printing,microfluidic devices,on-chip pumping,polydimethylsiloxane,polyethylene terephthalate,polymeric foils,propellant loading,pyrotechnical microelectromechanical systems balloon actuators,semianalytical model
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Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation
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| contributor author | de Koninck, David /A/. | |
| contributor author | Molina-Lopez, Francisco | |
| contributor author | Briand, Danick | |
| contributor author | de Rooij, Nico F. | |
| date accessioned | 2020-03-13T00:06:59Z | |
| date available | 2020-03-13T00:06:59Z | |
| date issued | 2014 | |
| identifier issn | 1057-7157 | |
| identifier other | 6825797.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1134961 | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation | |
| type | Journal Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8316379 | |
| subject keywords | electroplating | |
| subject keywords | foils | |
| subject keywords | ink jet printing | |
| subject keywords | microactuators | |
| subject keywords | microfluidics | |
| subject keywords | polymers | |
| subject keywords | surface treatment | |
| subject keywords | SU-8 | |
| subject keywords | cleanroom-free fabrication process | |
| subject keywords | device geometry | |
| subject keywords | electroplating | |
| subject keywords | fluid ejection | |
| subject keywords | foil-level inkjet-printed pyroMEMS balloon actuators | |
| subject keywords | igniter | |
| subject keywords | inflation height | |
| subject keywords | inkjet printing | |
| subject keywords | microfluidic devices | |
| subject keywords | on-chip pumping | |
| subject keywords | polydimethylsiloxane | |
| subject keywords | polyethylene terephthalate | |
| subject keywords | polymeric foils | |
| subject keywords | propellant loading | |
| subject keywords | pyrotechnical microelectromechanical systems balloon actuators | |
| subject keywords | semianalytical model | |
| identifier doi | 10.1109/JMEMS.2014.2314702 | |
| journal title | Microelectromechanical Systems, Journal of | |
| journal volume | 23 | |
| journal issue | 6 | |
| filesize | 3620026 | |
| citations | 0 |