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Inductively coupled plasma deposited amorphous silicon alloys using industrial equipment for heterojunction silicon solar cells

contributor authorMueller, T.
contributor authorJia Ge
contributor authorMuzhi Tang
contributor authorWong, J.
contributor authorZhi Peng Ling
contributor authorZhenhao Zhang
contributor authorDoerr, M.
contributor authorDippell, T.
contributor authorHohn, O.
contributor authorHuber, M.
contributor authorWohlfart, P.
date accessioned2020-03-12T21:06:16Z
date available2020-03-12T21:06:16Z
date issued2014
identifier other6925000.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1037113?locale-attribute=fa&show=full
formatgeneral
languageEnglish
publisherIEEE
titleInductively coupled plasma deposited amorphous silicon alloys using industrial equipment for heterojunction silicon solar cells
typeConference Paper
contenttypeMetadata Only
identifier padid8163380
subject keywordsAtmospheric measurements
subject keywordsElectrodes
subject keywordsEquations
subject keywordsFluids
subject keywordsGravity
subject keywordsMathematical model
subject keywordsParticle measurements
subject keywordsCOMSOL
subject keywordscomposite varistor
subject keywordsmicrovaristor
subject keywordsparticle movement
subject keywordsparticle-particle interaction
identifier doi10.1109/CEIDP.2014.6995887
journal titlehotovoltaic Specialist Conference (PVSC), 2014 IEEE 40th
filesize1125351
citations0


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