| contributor author | Jingting Zeng | |
| contributor author | Huodi Zhu | |
| date accessioned | 2020-03-12T21:04:36Z | |
| date available | 2020-03-12T21:04:36Z | |
| date issued | 2014 | |
| identifier other | 6923672.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1036144?locale-attribute=fa&show=full | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | R&D Human Capital Allocation in High-Tech Industries and Its Economic Effects | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8162298 | |
| subject keywords | chemical vapour deposition | |
| subject keywords | finite element analysis | |
| subject keywords | internal stresses | |
| subject keywords | membranes | |
| subject keywords | micromachining | |
| subject keywords | microsensors | |
| subject keywords | pressure sensors | |
| subject keywords | silicon compounds | |
| subject keywords | ANSYS software | |
| subject keywords | FEA model | |
| subject keywords | LPCVD | |
| subject keywords | SiN | |
| subject keywords | barometric pressure | |
| subject keywords | debonding | |
| subject keywords | delamination | |
| subject keywords | finite element method | |
| subject keywords | input-output characteristics | |
| subject keywords | low pressure chemical vapor deposition | |
| subject keywords | mechanical-electrical models | |
| subject keywords | membrane | |
| subject keywords | microcracking | |
| subject keywords | nonstressed diaphragm | |
| subject keywords | nonuniform stress profile | |
| subject keywords | pressure 100 MPa | |
| subject keywords | pressure 101 kPa | |
| subject keywords | pressure 120 kPa | |
| subject keywords | pressure-disp | |
| identifier doi | 10.1109/ICEPT.2014.6922742 | |
| journal title | omputational Sciences and Optimization (CSO), 2014 Seventh International Joint Conference on | |
| filesize | 303570 | |
| citations | 0 | |