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Analysis of laser typing spots at gold-plated kovar alloy cavity

contributor authorYuwei Zheng
contributor authorShengxiang Bao
contributor authorZhenzhen Rao
contributor authorChengshi Zhang
contributor authorYao Yan
date accessioned2020-03-12T21:03:33Z
date available2020-03-12T21:03:33Z
date issued2014
identifier other6922814.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1035507?locale-attribute=en&show=full
formatgeneral
languageEnglish
publisherIEEE
titleAnalysis of laser typing spots at gold-plated kovar alloy cavity
typeConference Paper
contenttypeMetadata Only
identifier padid8161573
subject keywordsbubbles
subject keywordsceramics
subject keywordscoatings
subject keywordselectronics packaging
subject keywordsgels
subject keywordshydrostatics
subject keywordslead bonding
subject keywordsmicrosensors
subject keywordspressure sensors
subject keywordsMEMS pressure sensor
subject keywordsbubble inflation
subject keywordsbubbles effect
subject keywordsceramic substrate
subject keywordschip surface protection
subject keywordscoating gel
subject keywordscured gel
subject keywordscuring processes
subject keywordsdispensing gel process
subject keywordsdispensing process parameters
subject keywordselevated air pressure
subject keywordshydrostatic fluid-element based 2D models
subject keywordslow-pressure sensor module production
subject keywordsmechanical behavior
subject keywordspackaged modules
subject keywordssensing membrane
subject keywordssensor chip
subject keywordssilicon ch
identifier doi10.1109/ICEPT.2014.6922738
journal titlelectronic Packaging Technology (ICEPT), 2014 15th International Conference on
filesize521294
citations0


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