Show simple item record

Crosstalk reduction in holographic wavelength selective switches based on phase-only LCOS devices

contributor authorHaining Yang , Robertson, B. , Daping Chu
date accessioned2020-03-12T20:44:36Z
date available2020-03-12T20:44:36Z
date issued2014
identifier other6886702.pdf
identifier urihttps://libsearch.um.ac.ir:443/fum/handle/fum/1023837?locale-attribute=fa&show=full
formatgeneral
languageEnglish
publisherIEEE
titleCrosstalk reduction in holographic wavelength selective switches based on phase-only LCOS devices
typeConference Paper
contenttypeMetadata Only
identifier padid8148683
subject keywordsCMOS integrated circuits
subject keywordschemical mechanical polishing
subject keywordsplanarisation
subject keywordstitanium compounds
subject keywordstungsten
subject keywordsC14nm
subject keywordsCMOS integration constraint
subject keywordsCMP performance
subject keywordsTi-TiN
subject keywordsW
subject keywordsWIWNU
subject keywordsbarrier selective approach
subject keywordscontact density
subject keywordsdamascene
subject keywordsgate building
subject keywordsoxide erosion
subject keywordsoxide loss
subject keywordsplanarization
subject keywordspolishing step
subject keywordsArrays
subject keywordsLogic gates
subject keywordsPlanarization
subject keywordsTin
subject keywordsTopology
subject keywordsTungsten
identifier doi10.1109/ICPT.2014.7017237
journal titleptical Fiber Communications Conference and Exhibition (OFC), 2014
filesize811481
citations0


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following Collection(s)

Show simple item record