Crosstalk reduction in holographic wavelength selective switches based on phase-only LCOS devices
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: 2014DOI: 10.1109/ICPT.2014.7017237
Keyword(s): CMOS integrated circuits,chemical mechanical polishing,planarisation,titanium compounds,tungsten,C14nm,CMOS integration constraint,CMP performance,Ti-TiN,W,WIWNU,barrier selective approach,contact density,damascene,gate building,oxide erosion,oxide loss,planarization,polishing step,Arrays,Logic gates,Planarization,Tin,Topology,Tungsten
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Crosstalk reduction in holographic wavelength selective switches based on phase-only LCOS devices
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| contributor author | Haining Yang , Robertson, B. , Daping Chu | |
| date accessioned | 2020-03-12T20:44:36Z | |
| date available | 2020-03-12T20:44:36Z | |
| date issued | 2014 | |
| identifier other | 6886702.pdf | |
| identifier uri | https://libsearch.um.ac.ir:443/fum/handle/fum/1023837?locale-attribute=en | |
| format | general | |
| language | English | |
| publisher | IEEE | |
| title | Crosstalk reduction in holographic wavelength selective switches based on phase-only LCOS devices | |
| type | Conference Paper | |
| contenttype | Metadata Only | |
| identifier padid | 8148683 | |
| subject keywords | CMOS integrated circuits | |
| subject keywords | chemical mechanical polishing | |
| subject keywords | planarisation | |
| subject keywords | titanium compounds | |
| subject keywords | tungsten | |
| subject keywords | C14nm | |
| subject keywords | CMOS integration constraint | |
| subject keywords | CMP performance | |
| subject keywords | Ti-TiN | |
| subject keywords | W | |
| subject keywords | WIWNU | |
| subject keywords | barrier selective approach | |
| subject keywords | contact density | |
| subject keywords | damascene | |
| subject keywords | gate building | |
| subject keywords | oxide erosion | |
| subject keywords | oxide loss | |
| subject keywords | planarization | |
| subject keywords | polishing step | |
| subject keywords | Arrays | |
| subject keywords | Logic gates | |
| subject keywords | Planarization | |
| subject keywords | Tin | |
| subject keywords | Topology | |
| subject keywords | Tungsten | |
| identifier doi | 10.1109/ICPT.2014.7017237 | |
| journal title | ptical Fiber Communications Conference and Exhibition (OFC), 2014 | |
| filesize | 811481 | |
| citations | 0 |