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Threshold Voltage Reduction and Mobility Improvement of LTPS-TFTs With NH<sub>3</sub> Plasma Treatment

Type: Journal Paper

Author : Ma, W.C.-Y.; Sheng-Wei Yuan; Tsung-Chieh Chan; Chi-Yuan Huang

Publisher: IEEE

Year: 2014

Reverse Electrical Behavior of N-Channel and P-Channel LTPS-TFTs by N<sub>2</sub>O Plasma Surface Treatment

Type: Journal Paper

Author : Ma, W.C.-Y.; Chi-Yuan Huang; Tsung-Chieh Chan; Sheng-Wei Yuan

Publisher: IEEE

Year: 2014

Author

Chi-Yuan Huang (2)

Ma, W.C.-Y. (2)

Sheng-Wei Yuan (2)

Tsung-Chieh Chan (2)

Publisher

IEEE (2)

Year

2014 (2)

Keywords

/sub&gt (2)

2&lt (2)

elemental semiconductors (2)

HfO&lt (2)

nitrogen compounds (2)

passivation (2)

silicon (2)

sub&gt (2)

thin film transistors (2)

#x03BA (1)

Type

Journal Paper (2)

Language (ISO)

English (2)

Content Type

Metadata Only (2)

Publication Title

Plasma Science, IEEE Transactions on (2)

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