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Electron heating, mode transitions, and asymmetry effects in dusty single- and dual-frequency capacitive discharges

Type: Conference Paper

Author : Schungel, E.; Schulze, J.; Mohr, S.; Iwashita, S.; Czarnetzki, U.

Publisher: IEEE

Year: 2014

Deposition of crystalline silicon thin films in electrically asymmetric capacitively coupled plasmas

Type: Conference Paper

Author : Schungel, E.; Schulze, J.; Mohr, S.; Hofmann, R.; Czarnetzki, U.

Publisher: IEEE

Year: 2014

Ion flux uniformity in large area capacitively coupled dual-frequency discharges

Type: Conference Paper

Author : Schungel, E.; Schulze, J.; Mohr, S.; Czarnetzki, U.

Publisher: IEEE

Year: 2014

Ion Distribution Functions in Electrically Asymmetric Capacitively Coupled Radio-Frequency Discharges in Hydrogen

Type: Journal Paper

Author : Mohr, S.; Schü ngel, Edmund; Schulze, J.; Czarnetzki, U.

Publisher: IEEE

Year: 2014

Author

Czarnetzki, U. (4)

Mohr, S. (4)

Schulze, J. (4)

Schungel, E. (3)

Hofmann, R. (1)

Iwashita, S. (1)

ngel, Edmund (1)

Schu&#x0308 (1)

Publisher

IEEE (4)

Year

2014 (4)

Keywords

approximation theory (1)

Ar (1)

argon (1)

argon ion distribution functions (1)

collisional sheaths (1)

Discharges (electric) (1)

Distribution functions (1)

electrically asymmetric capacitively coupled radiofrequency discharges (1)

Electrodes (1)

electrodes (1)

Type

Conference Paper (3)

Journal Paper (1)

Language (ISO)

English (4)

Content Type

Metadata Only (4)

Publication Title

lasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BE (3)

Plasma Science, IEEE Transactions on (1)

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