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ZnO Etching and Microtunnel Fabrication for High-Reliability MEMS Acoustic Sensor

Type: Journal Paper

Author : Prasad, M.; Sahula, Vineet; Khanna, Vinod Kumar

Publisher: IEEE

Year: 2014

Long-Term Effects of Relative Humidity on the Performance of ZnO-Based MEMS Acoustic Sensors

Type: Journal Paper

Author : Prasad, M.; Sahula, Vineet; Khanna, Vinod Kumar

Publisher: IEEE

Year: 2014

Author

Khanna, Vinod Kumar (2)

Prasad, M. (2)

Sahula, Vineet (2)

Publisher

IEEE (2)

Year

2014 (2)

Keywords

microsensors (2)

silicon diaphragm (2)

ZnO (2)

Acoustic measurements (1)

acoustic sensor chip (1)

Acoustic sensors (1)

Al (1)

aluminum electrodes (1)

aluminum metal (1)

bulk micromachining technique (1)

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Journal Paper (2)

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English (2)

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Metadata Only (2)

Publication Title

Device and Materials Reliability, IEEE Transactions on (2)

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